7/10/2010	9:48:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/10/2010	9:48:26 AM	Recipe started at 9:48 AM
7/10/2010	9:48:26 AM	H2 valve closed
7/10/2010	9:48:26 AM	BCl3 valve closed
7/10/2010	9:48:26 AM	PH3 valve closed
7/10/2010	9:48:26 AM	SiCl4 pre valve closed
7/10/2010	9:48:26 AM	SiCl4 post valve closed
7/10/2010	9:48:26 AM	Main Vac valve closed
7/10/2010	9:48:26 AM	Bypass valve closed
7/10/2010	9:48:26 AM	Bubbler valve closed
7/10/2010	9:48:26 AM	Helium valve opened
7/10/2010	9:48:26 AM	Helium MFC set to  500.000000
7/10/2010	9:48:26 AM	H2 MFC set to  0.000000
7/10/2010	9:48:26 AM	BCl3 MFC set to  0.000000
7/10/2010	9:48:26 AM	PHl3 MFC set to  0.000000
7/10/2010	9:48:26 AM	SiCl4 MFC set to  0.000000
7/10/2010	9:48:26 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	9:48:26 AM	Tube furnace set to 0
7/10/2010	9:48:38 AM	Helium valve closed
7/10/2010	9:48:38 AM	H2 valve closed
7/10/2010	9:48:38 AM	BCl3 valve closed
7/10/2010	9:48:38 AM	PH3 valve closed
7/10/2010	9:48:38 AM	SiCl4 pre valve closed
7/10/2010	9:48:38 AM	SiCl4 post valve closed
7/10/2010	9:48:38 AM	Main Vac valve closed
7/10/2010	9:48:38 AM	Bypass valve closed
7/10/2010	9:48:38 AM	Bubbler valve closed
7/10/2010	9:48:38 AM	Helium MFC set to  0.000000
7/10/2010	9:48:38 AM	H2 MFC set to  0.000000
7/10/2010	9:48:38 AM	BCl3 MFC set to  0.000000
7/10/2010	9:48:38 AM	PHl3 MFC set to  0.000000
7/10/2010	9:48:38 AM	SiCl4 MFC set to  0.000000
7/10/2010	9:48:38 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	9:48:39 AM	Tube furnace set to 0
7/10/2010	9:48:39 AM	Run finished at 9:48 AM
7/10/2010	9:48:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/10/2010	10:01:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/10/2010	10:01:40 AM	Recipe started at 10:01 AM
7/10/2010	10:01:40 AM	H2 valve closed
7/10/2010	10:01:40 AM	BCl3 valve closed
7/10/2010	10:01:40 AM	PH3 valve closed
7/10/2010	10:01:40 AM	SiCl4 pre valve closed
7/10/2010	10:01:40 AM	SiCl4 post valve closed
7/10/2010	10:01:40 AM	Main Vac valve closed
7/10/2010	10:01:40 AM	Bypass valve closed
7/10/2010	10:01:40 AM	Bubbler valve closed
7/10/2010	10:01:40 AM	Helium valve opened
7/10/2010	10:01:40 AM	Helium MFC set to  500.000000
7/10/2010	10:01:40 AM	H2 MFC set to  0.000000
7/10/2010	10:01:40 AM	BCl3 MFC set to  0.000000
7/10/2010	10:01:40 AM	PHl3 MFC set to  0.000000
7/10/2010	10:01:40 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:01:40 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:01:40 AM	Tube furnace set to 0
7/10/2010	10:01:42 AM	Helium valve closed
7/10/2010	10:01:42 AM	H2 valve closed
7/10/2010	10:01:42 AM	BCl3 valve closed
7/10/2010	10:01:42 AM	PH3 valve closed
7/10/2010	10:01:42 AM	SiCl4 pre valve closed
7/10/2010	10:01:42 AM	SiCl4 post valve closed
7/10/2010	10:01:42 AM	Main Vac valve closed
7/10/2010	10:01:42 AM	Bypass valve closed
7/10/2010	10:01:42 AM	Bubbler valve closed
7/10/2010	10:01:42 AM	Helium MFC set to  0.000000
7/10/2010	10:01:42 AM	H2 MFC set to  0.000000
7/10/2010	10:01:42 AM	BCl3 MFC set to  0.000000
7/10/2010	10:01:42 AM	PHl3 MFC set to  0.000000
7/10/2010	10:01:42 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:01:42 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:01:42 AM	Tube furnace set to 0
7/10/2010	10:01:57 AM	Helium valve closed
7/10/2010	10:01:57 AM	H2 valve closed
7/10/2010	10:01:57 AM	BCl3 valve closed
7/10/2010	10:01:57 AM	PH3 valve closed
7/10/2010	10:01:57 AM	SiCl4 pre valve closed
7/10/2010	10:01:57 AM	SiCl4 post valve closed
7/10/2010	10:01:57 AM	Main Vac valve closed
7/10/2010	10:01:57 AM	Bubbler valve closed
7/10/2010	10:01:57 AM	Bypass valve opened
7/10/2010	10:01:57 AM	Helium MFC set to  0.000000
7/10/2010	10:01:57 AM	H2 MFC set to  0.000000
7/10/2010	10:01:57 AM	BCl3 MFC set to  0.000000
7/10/2010	10:01:57 AM	PHl3 MFC set to  0.000000
7/10/2010	10:01:57 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:01:57 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:01:57 AM	Tube furnace set to 0
7/10/2010	10:02:45 AM	Helium valve closed
7/10/2010	10:02:45 AM	H2 valve closed
7/10/2010	10:02:45 AM	BCl3 valve closed
7/10/2010	10:02:45 AM	PH3 valve closed
7/10/2010	10:02:45 AM	SiCl4 pre valve closed
7/10/2010	10:02:45 AM	SiCl4 post valve closed
7/10/2010	10:02:45 AM	Bubbler valve closed
7/10/2010	10:02:45 AM	Main Vac valve opened
7/10/2010	10:02:45 AM	Bypass valve opened
7/10/2010	10:02:45 AM	Helium MFC set to  0.000000
7/10/2010	10:02:45 AM	H2 MFC set to  0.000000
7/10/2010	10:02:45 AM	BCl3 MFC set to  0.000000
7/10/2010	10:02:45 AM	PHl3 MFC set to  0.000000
7/10/2010	10:02:45 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:02:45 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:02:45 AM	Tube furnace set to 0
7/10/2010	10:07:45 AM	H2 valve closed
7/10/2010	10:07:45 AM	BCl3 valve closed
7/10/2010	10:07:45 AM	PH3 valve closed
7/10/2010	10:07:45 AM	SiCl4 pre valve closed
7/10/2010	10:07:45 AM	SiCl4 post valve closed
7/10/2010	10:07:45 AM	Main Vac valve closed
7/10/2010	10:07:45 AM	Bypass valve closed
7/10/2010	10:07:45 AM	Bubbler valve closed
7/10/2010	10:07:45 AM	Helium valve opened
7/10/2010	10:07:45 AM	Helium MFC set to  500.000000
7/10/2010	10:07:45 AM	H2 MFC set to  0.000000
7/10/2010	10:07:45 AM	BCl3 MFC set to  0.000000
7/10/2010	10:07:45 AM	PHl3 MFC set to  0.000000
7/10/2010	10:07:45 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:07:45 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:07:45 AM	Tube furnace set to 0
7/10/2010	10:09:07 AM	Helium valve closed
7/10/2010	10:09:07 AM	H2 valve closed
7/10/2010	10:09:07 AM	BCl3 valve closed
7/10/2010	10:09:07 AM	PH3 valve closed
7/10/2010	10:09:07 AM	SiCl4 pre valve closed
7/10/2010	10:09:07 AM	SiCl4 post valve closed
7/10/2010	10:09:07 AM	Main Vac valve closed
7/10/2010	10:09:07 AM	Bypass valve closed
7/10/2010	10:09:07 AM	Bubbler valve closed
7/10/2010	10:09:07 AM	Helium MFC set to  0.000000
7/10/2010	10:09:07 AM	H2 MFC set to  0.000000
7/10/2010	10:09:07 AM	BCl3 MFC set to  0.000000
7/10/2010	10:09:07 AM	PHl3 MFC set to  0.000000
7/10/2010	10:09:07 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:09:07 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:09:07 AM	Tube furnace set to 0
7/10/2010	10:09:22 AM	Helium valve closed
7/10/2010	10:09:22 AM	H2 valve closed
7/10/2010	10:09:22 AM	BCl3 valve closed
7/10/2010	10:09:22 AM	PH3 valve closed
7/10/2010	10:09:22 AM	SiCl4 pre valve closed
7/10/2010	10:09:22 AM	SiCl4 post valve closed
7/10/2010	10:09:22 AM	Main Vac valve closed
7/10/2010	10:09:22 AM	Bubbler valve closed
7/10/2010	10:09:22 AM	Bypass valve opened
7/10/2010	10:09:22 AM	Helium MFC set to  0.000000
7/10/2010	10:09:22 AM	H2 MFC set to  0.000000
7/10/2010	10:09:22 AM	BCl3 MFC set to  0.000000
7/10/2010	10:09:22 AM	PHl3 MFC set to  0.000000
7/10/2010	10:09:22 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:09:22 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:09:23 AM	Tube furnace set to 0
7/10/2010	10:09:57 AM	Helium valve closed
7/10/2010	10:09:57 AM	H2 valve closed
7/10/2010	10:09:57 AM	BCl3 valve closed
7/10/2010	10:09:57 AM	PH3 valve closed
7/10/2010	10:09:57 AM	SiCl4 pre valve closed
7/10/2010	10:09:57 AM	SiCl4 post valve closed
7/10/2010	10:09:57 AM	Bubbler valve closed
7/10/2010	10:09:57 AM	Main Vac valve opened
7/10/2010	10:09:57 AM	Bypass valve opened
7/10/2010	10:09:57 AM	Helium MFC set to  0.000000
7/10/2010	10:09:57 AM	H2 MFC set to  0.000000
7/10/2010	10:09:57 AM	BCl3 MFC set to  0.000000
7/10/2010	10:09:57 AM	PHl3 MFC set to  0.000000
7/10/2010	10:09:57 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:09:57 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:09:57 AM	Tube furnace set to 0
7/10/2010	10:14:57 AM	H2 valve closed
7/10/2010	10:14:57 AM	BCl3 valve closed
7/10/2010	10:14:57 AM	PH3 valve closed
7/10/2010	10:14:57 AM	SiCl4 pre valve closed
7/10/2010	10:14:57 AM	SiCl4 post valve closed
7/10/2010	10:14:57 AM	Main Vac valve closed
7/10/2010	10:14:57 AM	Bypass valve closed
7/10/2010	10:14:57 AM	Bubbler valve closed
7/10/2010	10:14:57 AM	Helium valve opened
7/10/2010	10:14:57 AM	Helium MFC set to  500.000000
7/10/2010	10:14:57 AM	H2 MFC set to  0.000000
7/10/2010	10:14:57 AM	BCl3 MFC set to  0.000000
7/10/2010	10:14:57 AM	PHl3 MFC set to  0.000000
7/10/2010	10:14:57 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:14:57 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:14:57 AM	Tube furnace set to 0
7/10/2010	10:16:19 AM	Helium valve closed
7/10/2010	10:16:19 AM	H2 valve closed
7/10/2010	10:16:19 AM	BCl3 valve closed
7/10/2010	10:16:19 AM	PH3 valve closed
7/10/2010	10:16:20 AM	SiCl4 pre valve closed
7/10/2010	10:16:20 AM	SiCl4 post valve closed
7/10/2010	10:16:20 AM	Main Vac valve closed
7/10/2010	10:16:20 AM	Bypass valve closed
7/10/2010	10:16:20 AM	Bubbler valve closed
7/10/2010	10:16:20 AM	Helium MFC set to  0.000000
7/10/2010	10:16:20 AM	H2 MFC set to  0.000000
7/10/2010	10:16:20 AM	BCl3 MFC set to  0.000000
7/10/2010	10:16:20 AM	PHl3 MFC set to  0.000000
7/10/2010	10:16:20 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:16:20 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:16:20 AM	Tube furnace set to 0
7/10/2010	10:16:35 AM	Helium valve closed
7/10/2010	10:16:35 AM	H2 valve closed
7/10/2010	10:16:35 AM	BCl3 valve closed
7/10/2010	10:16:35 AM	PH3 valve closed
7/10/2010	10:16:35 AM	SiCl4 pre valve closed
7/10/2010	10:16:35 AM	SiCl4 post valve closed
7/10/2010	10:16:35 AM	Main Vac valve closed
7/10/2010	10:16:35 AM	Bubbler valve closed
7/10/2010	10:16:35 AM	Bypass valve opened
7/10/2010	10:16:35 AM	Helium MFC set to  0.000000
7/10/2010	10:16:35 AM	H2 MFC set to  0.000000
7/10/2010	10:16:35 AM	BCl3 MFC set to  0.000000
7/10/2010	10:16:35 AM	PHl3 MFC set to  0.000000
7/10/2010	10:16:35 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:16:35 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:16:35 AM	Tube furnace set to 0
7/10/2010	10:17:09 AM	Helium valve closed
7/10/2010	10:17:09 AM	H2 valve closed
7/10/2010	10:17:09 AM	BCl3 valve closed
7/10/2010	10:17:09 AM	PH3 valve closed
7/10/2010	10:17:09 AM	SiCl4 pre valve closed
7/10/2010	10:17:09 AM	SiCl4 post valve closed
7/10/2010	10:17:09 AM	Bubbler valve closed
7/10/2010	10:17:09 AM	Main Vac valve opened
7/10/2010	10:17:09 AM	Bypass valve opened
7/10/2010	10:17:09 AM	Helium MFC set to  0.000000
7/10/2010	10:17:09 AM	H2 MFC set to  0.000000
7/10/2010	10:17:09 AM	BCl3 MFC set to  0.000000
7/10/2010	10:17:09 AM	PHl3 MFC set to  0.000000
7/10/2010	10:17:09 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:17:09 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:17:09 AM	Tube furnace set to 0
7/10/2010	10:21:50 AM	Helium valve closed
7/10/2010	10:21:50 AM	H2 valve closed
7/10/2010	10:21:50 AM	BCl3 valve closed
7/10/2010	10:21:50 AM	PH3 valve closed
7/10/2010	10:21:50 AM	SiCl4 pre valve closed
7/10/2010	10:21:50 AM	SiCl4 post valve closed
7/10/2010	10:21:50 AM	Bubbler valve closed
7/10/2010	10:21:50 AM	Main Vac valve opened
7/10/2010	10:21:50 AM	Bypass valve opened
7/10/2010	10:21:50 AM	Helium MFC set to  0.000000
7/10/2010	10:21:50 AM	H2 MFC set to  0.000000
7/10/2010	10:21:50 AM	BCl3 MFC set to  0.000000
7/10/2010	10:21:50 AM	PHl3 MFC set to  0.000000
7/10/2010	10:21:50 AM	SiCl4 MFC set to  0.000000
7/10/2010	10:21:50 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	10:21:50 AM	Tube furnace set to 0
7/10/2010	10:21:51 AM	Run finished at 10:21 AM
7/10/2010	10:21:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/10/2010	10:22:02 AM	Helium MFC set to  100.000000
7/10/2010	10:22:03 AM	Helium valve opened
7/10/2010	10:23:24 AM	Helium valve closed
7/10/2010	10:24:20 AM	Helium valve opened
7/10/2010	10:26:44 AM	Helium valve closed
7/10/2010	11:10:09 AM	Helium valve opened
7/10/2010	11:11:08 AM	Helium valve closed
7/10/2010	11:12:30 AM	Recipe started at 11:12 AM
7/10/2010	11:12:30 AM	Helium valve closed
7/10/2010	11:12:30 AM	BCl3 valve closed
7/10/2010	11:12:30 AM	PH3 valve closed
7/10/2010	11:12:30 AM	SiCl4 pre valve closed
7/10/2010	11:12:30 AM	SiCl4 post valve closed
7/10/2010	11:12:30 AM	Main Vac valve closed
7/10/2010	11:12:30 AM	Bypass valve closed
7/10/2010	11:12:30 AM	Bubbler valve closed
7/10/2010	11:12:30 AM	H2 valve opened
7/10/2010	11:12:30 AM	Helium MFC set to  0.000000
7/10/2010	11:12:30 AM	H2 MFC set to  500.000000
7/10/2010	11:12:30 AM	BCl3 MFC set to  0.000000
7/10/2010	11:12:30 AM	PHl3 MFC set to  0.000000
7/10/2010	11:12:30 AM	SiCl4 MFC set to  0.000000
7/10/2010	11:12:30 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	11:12:30 AM	Tube furnace set to 0
7/10/2010	11:12:37 AM	Helium valve closed
7/10/2010	11:12:37 AM	BCl3 valve closed
7/10/2010	11:12:37 AM	PH3 valve closed
7/10/2010	11:12:37 AM	SiCl4 pre valve closed
7/10/2010	11:12:37 AM	SiCl4 post valve closed
7/10/2010	11:12:37 AM	Main Vac valve closed
7/10/2010	11:12:37 AM	Bypass valve closed
7/10/2010	11:12:37 AM	H2 valve opened
7/10/2010	11:12:37 AM	Bubbler valve opened
7/10/2010	11:12:37 AM	Helium MFC set to  0.000000
7/10/2010	11:12:37 AM	H2 MFC set to  500.000000
7/10/2010	11:12:37 AM	BCl3 MFC set to  0.000000
7/10/2010	11:12:37 AM	PHl3 MFC set to  0.000000
7/10/2010	11:12:37 AM	SiCl4 MFC set to  0.000000
7/10/2010	11:12:37 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	11:12:37 AM	Tube furnace set to 1000
7/10/2010	11:12:44 AM	Helium valve closed
7/10/2010	11:12:44 AM	PH3 valve closed
7/10/2010	11:12:44 AM	Main Vac valve closed
7/10/2010	11:12:44 AM	Bypass valve closed
7/10/2010	11:12:44 AM	H2 valve opened
7/10/2010	11:12:44 AM	BCl3 valve opened
7/10/2010	11:12:44 AM	SiCl4 pre valve opened
7/10/2010	11:12:44 AM	SiCl4 post valve opened
7/10/2010	11:12:44 AM	Bubbler valve opened
7/10/2010	11:12:44 AM	Helium MFC set to  0.000000
7/10/2010	11:12:44 AM	H2 MFC set to  500.000000
7/10/2010	11:12:44 AM	BCl3 MFC set to  15.000000
7/10/2010	11:12:44 AM	PHl3 MFC set to  0.000000
7/10/2010	11:12:44 AM	SiCl4 MFC set to  50.000000
7/10/2010	11:12:44 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	11:12:44 AM	Tube furnace set to 1000
7/10/2010	11:12:58 AM	Run aborted at 11:12 AM
7/10/2010	11:12:58 AM	Helium valve closed
7/10/2010	11:12:58 AM	H2 valve closed
7/10/2010	11:12:58 AM	BCl3 valve closed
7/10/2010	11:12:58 AM	PH3 valve closed
7/10/2010	11:12:58 AM	SiCl4 pre valve closed
7/10/2010	11:12:58 AM	SiCl4 post valve closed
7/10/2010	11:12:58 AM	Bypass valve closed
7/10/2010	11:12:58 AM	Main Vac valve closed
7/10/2010	11:12:58 AM	Bubbler valve closed
7/10/2010	11:12:58 AM	Helium MFC set to  0.000000
7/10/2010	11:12:58 AM	H2 MFC set to  0.000000
7/10/2010	11:12:58 AM	BCl3 MFC set to  0.000000
7/10/2010	11:12:58 AM	PHl3 MFC set to  0.000000
7/10/2010	11:12:58 AM	SiCl4 MFC set to  0.000000
7/10/2010	11:12:58 AM	Tube furnace set to 0
7/10/2010	11:13:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/10/2010	11:13:03 AM	Recipe started at 11:13 AM
7/10/2010	11:13:03 AM	Helium valve closed
7/10/2010	11:13:03 AM	H2 valve closed
7/10/2010	11:13:03 AM	BCl3 valve closed
7/10/2010	11:13:03 AM	PH3 valve closed
7/10/2010	11:13:03 AM	SiCl4 pre valve closed
7/10/2010	11:13:03 AM	SiCl4 post valve closed
7/10/2010	11:13:03 AM	Main Vac valve closed
7/10/2010	11:13:03 AM	Bubbler valve closed
7/10/2010	11:13:03 AM	Bypass valve opened
7/10/2010	11:13:03 AM	Helium MFC set to  0.000000
7/10/2010	11:13:03 AM	H2 MFC set to  0.000000
7/10/2010	11:13:03 AM	BCl3 MFC set to  0.000000
7/10/2010	11:13:03 AM	PHl3 MFC set to  0.000000
7/10/2010	11:13:03 AM	SiCl4 MFC set to  0.000000
7/10/2010	11:13:03 AM	Bypass solenoid MFC set to  0.000000
7/10/2010	11:13:03 AM	Tube furnace set to 0
7/10/2010	11:13:20 AM	Run aborted at 11:13 AM
7/10/2010	11:13:20 AM	Helium valve closed
7/10/2010	11:13:20 AM	H2 valve closed
7/10/2010	11:13:20 AM	BCl3 valve closed
7/10/2010	11:13:20 AM	PH3 valve closed
7/10/2010	11:13:20 AM	SiCl4 pre valve closed
7/10/2010	11:13:20 AM	SiCl4 post valve closed
7/10/2010	11:13:20 AM	Bypass valve closed
7/10/2010	11:13:20 AM	Main Vac valve closed
7/10/2010	11:13:20 AM	Bubbler valve closed
7/10/2010	11:13:20 AM	Helium MFC set to  0.000000
7/10/2010	11:13:20 AM	H2 MFC set to  0.000000
7/10/2010	11:13:20 AM	BCl3 MFC set to  0.000000
7/10/2010	11:13:20 AM	PHl3 MFC set to  0.000000
7/10/2010	11:13:20 AM	SiCl4 MFC set to  0.000000
7/10/2010	11:13:20 AM	Tube furnace set to 0
7/10/2010	11:13:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/10/2010	11:56:37 AM	Program started after a nonstandard shutdown
7/10/2010	11:56:37 AM	Helium valve closed
7/10/2010	11:56:37 AM	H2 valve closed
7/10/2010	11:56:37 AM	BCl3 valve closed
7/10/2010	11:56:37 AM	PH3 valve closed
7/10/2010	11:56:37 AM	SiCl4 pre valve closed
7/10/2010	11:56:37 AM	SiCl4 post valve closed
7/10/2010	11:56:37 AM	Main Vac valve closed
7/10/2010	11:56:37 AM	Bypass valve closed
7/10/2010	11:56:37 AM	Bubbler valve closed
7/10/2010	11:56:37 AM	Helium MFC set to  0.000000
7/10/2010	11:56:37 AM	H2 MFC set to  0.000000
7/10/2010	11:56:37 AM	BCl3 MFC set to  0.000000
7/10/2010	11:56:37 AM	PHl3 MFC set to  0.000000
7/10/2010	11:56:37 AM	SiCl4 MFC set to  0.000000
7/10/2010	11:56:37 AM	Bypass solenoid MFC set to  760.000000
7/10/2010	11:56:37 AM	Tube furnace set to 0
7/10/2010	11:56:40 AM	Bypass valve opened
7/10/2010	11:56:41 AM	Bypass valve closed
7/10/2010	11:56:43 AM	Bypass valve opened
7/10/2010	11:56:44 AM	Bypass valve closed
7/10/2010	11:56:47 AM	Bypass valve opened
7/10/2010	11:56:48 AM	Bypass valve closed
7/10/2010	11:56:52 AM	Bypass valve opened
7/10/2010	12:02:08 PM	Bypass valve closed
7/10/2010	12:03:35 PM	Bypass valve opened
7/10/2010	12:07:33 PM	Bypass valve closed
7/10/2010	12:21:20 PM	Main Vac valve opened
7/10/2010	12:22:30 PM	Main Vac valve closed
7/10/2010	1:02:46 PM	Bypass valve opened
7/10/2010	1:02:47 PM	Bypass valve closed
7/10/2010	1:03:08 PM	Recipe started at 1:03 PM
7/10/2010	1:03:08 PM	Helium valve closed
7/10/2010	1:03:08 PM	H2 valve closed
7/10/2010	1:03:08 PM	BCl3 valve closed
7/10/2010	1:03:08 PM	PH3 valve closed
7/10/2010	1:03:08 PM	SiCl4 pre valve closed
7/10/2010	1:03:08 PM	SiCl4 post valve closed
7/10/2010	1:03:08 PM	Main Vac valve closed
7/10/2010	1:03:08 PM	Bubbler valve closed
7/10/2010	1:03:08 PM	Bypass valve opened
7/10/2010	1:03:08 PM	Helium MFC set to  100.000000
7/10/2010	1:03:08 PM	H2 MFC set to  0.000000
7/10/2010	1:03:08 PM	BCl3 MFC set to  0.000000
7/10/2010	1:03:08 PM	PHl3 MFC set to  0.000000
7/10/2010	1:03:08 PM	SiCl4 MFC set to  0.000000
7/10/2010	1:03:08 PM	Bypass solenoid MFC set to  0.000000
7/10/2010	1:03:08 PM	Tube furnace set to 0
7/10/2010	1:03:28 PM	Run finished at 1:03 PM
7/10/2010	1:03:41 PM	Bypass valve closed
7/10/2010	1:04:14 PM	Recipe started at 1:04 PM
7/10/2010	1:04:14 PM	Helium valve closed
7/10/2010	1:04:14 PM	H2 valve closed
7/10/2010	1:04:14 PM	BCl3 valve closed
7/10/2010	1:04:14 PM	PH3 valve closed
7/10/2010	1:04:14 PM	SiCl4 pre valve closed
7/10/2010	1:04:14 PM	SiCl4 post valve closed
7/10/2010	1:04:14 PM	Main Vac valve closed
7/10/2010	1:04:14 PM	Bubbler valve closed
7/10/2010	1:04:14 PM	Bypass valve opened
7/10/2010	1:04:14 PM	Helium MFC set to  100.000000
7/10/2010	1:04:14 PM	H2 MFC set to  0.000000
7/10/2010	1:04:14 PM	BCl3 MFC set to  0.000000
7/10/2010	1:04:14 PM	PHl3 MFC set to  0.000000
7/10/2010	1:04:14 PM	SiCl4 MFC set to  0.000000
7/10/2010	1:04:14 PM	Bypass solenoid MFC set to  0.000000
7/10/2010	1:04:15 PM	Tube furnace set to 0
7/10/2010	1:04:35 PM	Helium valve closed
7/10/2010	1:04:35 PM	H2 valve closed
7/10/2010	1:04:35 PM	BCl3 valve closed
7/10/2010	1:04:35 PM	PH3 valve closed
7/10/2010	1:04:35 PM	SiCl4 pre valve closed
7/10/2010	1:04:35 PM	SiCl4 post valve closed
7/10/2010	1:04:35 PM	Main Vac valve closed
7/10/2010	1:04:35 PM	Bypass valve closed
7/10/2010	1:04:35 PM	Bubbler valve closed
7/10/2010	1:04:35 PM	Helium MFC set to  100.000000
7/10/2010	1:04:35 PM	H2 MFC set to  0.000000
7/10/2010	1:04:35 PM	BCl3 MFC set to  0.000000
7/10/2010	1:04:35 PM	PHl3 MFC set to  0.000000
7/10/2010	1:04:35 PM	SiCl4 MFC set to  0.000000
7/10/2010	1:04:35 PM	Bypass solenoid MFC set to  0.000000
7/10/2010	1:04:35 PM	Tube furnace set to 0
7/10/2010	1:04:35 PM	Run finished at 1:04 PM
7/10/2010	6:49:36 PM	Bypass valve opened
7/10/2010	6:49:39 PM	Bypass valve closed
7/10/2010	6:49:41 PM	Bypass valve opened
7/10/2010	6:49:42 PM	Bypass valve closed
7/10/2010	6:49:44 PM	Bypass valve opened
7/10/2010	6:50:11 PM	Bypass valve closed
7/10/2010	6:50:14 PM	Bypass valve opened
7/10/2010	6:51:13 PM	Bypass valve closed
7/10/2010	7:10:10 PM	Program exited cleanly
7/10/2010	7:17:13 PM	Program started normally
7/10/2010	7:17:13 PM	Helium valve closed
7/10/2010	7:17:13 PM	H2 valve closed
7/10/2010	7:17:13 PM	BCl3 valve closed
7/10/2010	7:17:13 PM	PH3 valve closed
7/10/2010	7:17:13 PM	SiCl4 pre valve closed
7/10/2010	7:17:13 PM	SiCl4 post valve closed
7/10/2010	7:17:13 PM	Main Vac valve closed
7/10/2010	7:17:13 PM	Bypass valve closed
7/10/2010	7:17:13 PM	Bubbler valve closed
7/10/2010	7:17:13 PM	Helium MFC set to  0.000000
7/10/2010	7:17:13 PM	H2 MFC set to  0.000000
7/10/2010	7:17:13 PM	BCl3 MFC set to  0.000000
7/10/2010	7:17:13 PM	PHl3 MFC set to  0.000000
7/10/2010	7:17:13 PM	SiCl4 MFC set to  0.000000
7/10/2010	7:17:13 PM	Bypass solenoid MFC set to  760.000000
7/10/2010	7:17:14 PM	Tube furnace set to 0
7/10/2010	7:17:16 PM	Program exited cleanly
7/10/2010	7:17:18 PM	Program started normally
7/10/2010	7:17:18 PM	Helium valve closed
7/10/2010	7:17:18 PM	H2 valve closed
7/10/2010	7:17:18 PM	BCl3 valve closed
7/10/2010	7:17:18 PM	PH3 valve closed
7/10/2010	7:17:18 PM	SiCl4 pre valve closed
7/10/2010	7:17:18 PM	SiCl4 post valve closed
7/10/2010	7:17:18 PM	Main Vac valve closed
7/10/2010	7:17:18 PM	Bypass valve closed
7/10/2010	7:17:18 PM	Bubbler valve closed
7/10/2010	7:17:18 PM	Helium MFC set to  0.000000
7/10/2010	7:17:18 PM	H2 MFC set to  0.000000
7/10/2010	7:17:18 PM	BCl3 MFC set to  0.000000
7/10/2010	7:17:18 PM	PHl3 MFC set to  0.000000
7/10/2010	7:17:18 PM	SiCl4 MFC set to  0.000000
7/10/2010	7:17:18 PM	Bypass solenoid MFC set to  760.000000
7/10/2010	7:17:18 PM	Tube furnace set to 0
7/10/2010	7:17:41 PM	Main Vac valve opened
7/10/2010	7:17:41 PM	Main Vac valve closed
7/10/2010	7:17:55 PM	Main Vac valve opened
7/10/2010	7:27:28 PM	Main Vac valve closed
7/10/2010	7:27:44 PM	Main Vac valve opened
7/10/2010	7:27:57 PM	Main Vac valve closed
7/10/2010	7:28:23 PM	Main Vac valve opened
7/10/2010	7:28:44 PM	Main Vac valve closed
7/10/2010	7:45:34 PM	Main Vac valve opened
7/10/2010	7:46:13 PM	Main Vac valve closed
7/10/2010	7:46:18 PM	Main Vac valve opened
7/10/2010	7:47:02 PM	Main Vac valve closed
7/10/2010	7:47:06 PM	Main Vac valve opened
7/10/2010	7:49:07 PM	Main Vac valve closed
7/10/2010	7:49:10 PM	Main Vac valve opened
7/10/2010	7:49:24 PM	Main Vac valve closed
7/10/2010	7:58:12 PM	Main Vac valve opened
7/10/2010	7:59:19 PM	Bypass valve opened
7/10/2010	7:59:19 PM	Bypass valve closed
7/10/2010	7:59:31 PM	Bypass valve opened
7/10/2010	8:00:36 PM	H2 valve opened
7/10/2010	8:00:38 PM	H2 valve closed
7/10/2010	8:00:51 PM	H2 valve opened
7/10/2010	8:01:24 PM	Main Vac valve closed
7/10/2010	8:01:26 PM	Main Vac valve opened
7/10/2010	9:08:28 PM	Main Vac valve closed
7/10/2010	9:08:31 PM	Main Vac valve opened
7/10/2010	9:09:16 PM	Bypass valve closed
7/10/2010	9:09:17 PM	H2 valve closed
7/10/2010	9:09:18 PM	Main Vac valve closed
